High-Performance Ceramic-to-Metal Vacuum Feedthroughs

Semiconductor Manufacturing

• PVD systems
• CVD systems
• Plasma processing equipment
• Etching systems
• Vacuum coating equipment
• Semiconductor process chambers

Scientific Research

• Electron microscopes
• Mass spectrometers
• Particle accelerators
• Surface analysis systems
• Beamline equipment
• Laboratory vacuum chambers

Industrial Vacuum Systems

• Vacuum furnaces
• Vacuum heat-treatment equipment
• Space simulation chambers
• Vacuum test systems
• Deposition and coating equipment

X-Ray & High-Voltage Equipment

• X-ray systems
• High-voltage vacuum equipment
• Vacuum tube assemblies
• Radiation equipment
• High-voltage test systems

Medical & Analytical Instruments

• Medical diagnostic equipment
• Laboratory analyzers
• Vacuum-based sensors
• Analytical instruments

Available Feedthrough Configurations

Power Feedthroughs

Designed for transmitting electrical power through vacuum chamber walls with appropriate current-carrying conductors and ceramic insulation.

High-Voltage Feedthroughs

Suitable for applications requiring electrical isolation and voltage transmission under vacuum conditions.

Multi-Pin Feedthroughs

Multiple isolated conductors can be integrated into one flange or housing for control, sensing, instrumentation, and signal transmission.

Coaxial & RF Feedthroughs

Available for applications requiring controlled signal transmission, shielding, or coaxial connector interfaces.

Thermocouple Feedthroughs

Designed for transmitting thermocouple signals through vacuum boundaries while maintaining system sealing.

Fluid Feedthroughs

Custom interfaces can be developed for transferring compatible fluids or gases through vacuum systems.

Flange Options

CF Flange

Suitable for ultra-high-vacuum applications, high-temperature bakeout, and demanding scientific or semiconductor systems.

KF Flange

Commonly used in high-vacuum systems where quick installation and frequent disassembly are required.

ISO Flange

Suitable for larger vacuum systems and applications requiring larger nominal flange sizes.

The final flange selection should be based on vacuum level, temperature, system dimensions, installation method, and maintenance requirements.

Ceramic-to-Metal Sealing Structure

A typical vacuum feedthrough may include:

• High-purity alumina ceramic insulator
• Metal conductor or conductor pins
• Metallized ceramic joining surfaces
• Brazed ceramic-to-metal interfaces
• Metal housing
• Vacuum flange
• Optional external connector

The ceramic provides electrical insulation, while the metal components provide electrical, mechanical, or fluid interfaces. The brazed joint maintains structural integrity and vacuum sealing.

Design Considerations

The performance of a vacuum feedthrough depends on the complete assembly design rather than any single material property.

Important design parameters include:

• Working voltage
• Rated current
• Number of conductors
• Pin spacing
• Conductor diameter
• Ceramic grade
• Creepage and clearance distance
• Vacuum level
• Helium leak-rate requirement
• Operating temperature
• Bakeout temperature
• Flange type
• Connector type
• Grounded or floating configuration
• Conductor material
• Housing material
• Mechanical loading

Custom Vacuum Feedthroughs

TecCera supports custom feedthrough development based on customer drawings and application requirements.

Customization options include:

• Pin count
• Pin diameter and spacing
• Voltage rating
• Current rating
• Ceramic material
• Ceramic dimensions
• Flange type
• Connector type
• Shielding
• Grounded or floating configuration
• Conductor material
• Housing material
• Operating temperature
• Vacuum level
• Helium leak-rate requirement
• Installation dimensions

For quotation, please provide a drawing whenever possible, together with voltage, current, pin count, flange type, vacuum level, operating temperature, leak-rate requirement, quantity, and application details.

FAQ

What is a vacuum feedthrough?

A vacuum feedthrough is a sealed interface that allows electrical power, signals, fluids, or other system connections to pass through a vacuum chamber wall while maintaining vacuum integrity.

What vacuum levels are these feedthroughs suitable for?

Feedthroughs can be designed for high-vacuum and ultra-high-vacuum applications. Final vacuum performance depends on materials, flange type, brazing design, sealing structure, and system conditions.

What is the maximum bakeout temperature?

Selected configurations can support bakeout temperatures up to approximately 450°C. The actual allowable temperature depends on the ceramic, metal materials, brazing alloy, flange, connector, and assembly design.

How do I choose between CF, KF, and ISO flanges?

CF is generally preferred for ultra-high-vacuum and high-temperature bakeout applications. KF is widely used for high-vacuum systems requiring fast installation. ISO flanges are commonly used for larger vacuum systems.

Can high-voltage feedthroughs be customized?

Yes. Ceramic geometry, insulation distance, conductor design, pin spacing, flange type, and materials can be customized according to voltage and vacuum requirements.

Can high-current feedthroughs be customized?

Yes. Conductor diameter, material, thermal management, connection method, and ceramic structure can be engineered according to current requirements.

Can the number of pins be customized?

Yes. Both single-pin and multi-pin configurations are available.

Can helium leak testing be provided?

Yes. Helium leak testing can be performed according to agreed customer requirements and technical specifications.

Do you support custom connectors and shielding?

Yes. Connector type, shielding, grounding configuration, conductor arrangement, and mechanical interface can be customized depending on the application.

What information is required for a quotation?

Please provide:

• Drawing
• Working voltage
• Rated current
• Pin count
• Flange type
• Vacuum level
• Operating temperature
• Connector type
• Conductor material
• Helium leak-rate requirement
• Quantity
• Application details