Ceramic-to-Metal Vacuum Electrical Feedthrough

Semiconductor Equipment

• PVD systems
• CVD systems
• Plasma processing equipment
• Etching systems
• Vacuum coating chambers
• Semiconductor process tools

Scientific Instruments

• Electron microscopes
• Mass spectrometers
• Surface analysis equipment
• Particle accelerators
• Vacuum measurement systems
• Laboratory vacuum chambers

X-Ray & High-Voltage Systems

• X-ray equipment
• High-voltage vacuum systems
• Radiation equipment
• Vacuum tube assemblies
• Electrical isolation interfaces

Industrial Vacuum Equipment

• Vacuum furnaces
• Heat-treatment systems
• Space simulation chambers
• Vacuum test equipment
• Coating and deposition systems

Medical & Analytical Equipment

• Medical diagnostic systems
• Vacuum-based analytical instruments
• Hermetic sensors
• Laboratory instrumentation

Ceramic-to-Metal Sealing Structure

The feedthrough typically consists of:

• Alumina ceramic insulator
• Metal conductor pins
• Metallized ceramic joining areas
• Brazed ceramic-to-metal interfaces
• Stainless steel or alloy housing
• Vacuum flange or mounting interface

The ceramic provides electrical insulation while the metal conductors provide power or signal transmission. The brazed ceramic-to-metal interfaces maintain mechanical integrity and vacuum sealing.

Design Considerations

The final feedthrough design should be selected according to the complete operating environment.

Key factors include:

• Working voltage
• Rated current
• Number of pins
• Pin spacing
• Conductor diameter
• Ceramic grade
• Creepage and clearance distance
• Vacuum level
• Required helium leak rate
• Operating temperature
• Bakeout temperature
• Flange type
• Connector type
• Conductor material
• Housing material
• Grounding or floating requirements
• Mechanical loading

Custom Vacuum Electrical Feedthroughs

TecCera supports custom feedthrough development based on customer drawings and system requirements.

Customization options include:

• Single-pin or multi-pin design
• Pin diameter and spacing
• Voltage and current rating
• Ceramic dimensions
• Metallization area
• Flange geometry
• Connector type
• Shielding
• Grounded or electrically isolated configuration
• Conductor material
• Housing material
• Leak-rate requirement
• Operating temperature
• Installation dimensions

For quotation, please provide your drawing or required voltage, current, pin count, flange type, vacuum level, operating temperature, leak-rate requirement, and quantity.

FAQ

What is a vacuum electrical feedthrough?

A vacuum electrical feedthrough allows electrical power or signals to pass through a vacuum chamber wall while maintaining electrical insulation and vacuum sealing.

Why is alumina ceramic used in vacuum feedthroughs?

Alumina provides high dielectric strength, electrical resistivity, thermal stability, mechanical strength, and compatibility with ceramic-to-metal metallization and brazing processes.

Can the pin count be customized?

Yes. Single-pin and multi-pin configurations can be manufactured according to electrical and mechanical requirements.

Can high-voltage feedthroughs be customized?

Yes. Ceramic dimensions, pin spacing, creepage distance, conductor design, and flange geometry can be engineered according to the required working voltage.

Can helium leak testing be provided?

Yes. Helium leak testing can be performed according to the agreed technical specification.

Which flange types are available?

CF, KF, ISO, and custom flange or housing configurations can be supported depending on vacuum level and system integration requirements.

What information is needed for a quotation?

Please provide:

• Drawing
• Working voltage
• Rated current
• Pin count
• Pin diameter
• Flange type
• Vacuum level
• Operating temperature
• Helium leak-rate requirement
• Connector requirements
• Quantity
• Application details